97 research outputs found
Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding
We demonstrate fabrication of a microtoroid resonator of a high-quality
(high-Q) factor using femtosecond laser three-dimensional (3D) micromachining.
A fiber taper is reliably assembled to the microtoroid using CO2 laser welding.
Specifically, we achieve a high Q-factor of 2.12*10^6 in the
microresonator-fiber assembly by optimizing the contact position between the
fiber taper and the microtoroid.Comment: 7 pages, 5 figure
Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk
resonators using water-assisted femtosecond laser micromachining. Focused ion
beam (FIB) milling is used to create ultra-smooth sidewalls. The quality
(Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at
wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from
the bottom surface of the disk whose roughness remains high due to the
femtosecond laser micromachining process. This technique facilitates formation
of on-chip microresonators on various kinds of bulk crystalline materials,
which can benefit a wide range of applications such as nonlinear optics,
quantum optics, and chip-level integration of photonic devices.Comment: 7 pages, 3 figure
On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes
We demonstrate electro-optic tuning of an on-chip lithium niobate
microresonator with integrated in-plane microelectrodes. First two metallic
microelectrodes on the substrate were formed via femtosecond laser process.
Then a high-Q lithium niobate microresonator located between the
microelectrodes was fabricated by femtosecond laser direct writing accompanied
by focused ion beam milling. Due to the efficient structure designing, high
electro-optical tuning coefficient of 3.41 pm/V was observed.Comment: 6 pages, 3 figure
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